Fabrication and Characterization of Polypyrrole/Gold Bilayer Microactuators for Bio-Mems Applications

The proof of concept for conjugated polymer bilayer microactuators had been demonstrated prior to this dissertation with numerous devices, and their advantages in biomedical applications had been recognized. The next step for this technology was implementation in real systems, which required knowledge of the main performance metrics and limitations. In this dissertation, work focused on measuring these metrics for the first time to facilitate the development of cell-clinics, which are microsystems for cell study and for cell-based sensing. The conjugated polymer used throughout the dissertation was polypyrrole doped with dodecylbenzenesulfonate, PPy(DBS), and the second layer in the bilayer was gold. Device fabrication challenges were first identified and addressed, focusing particularly on methods to produce PPy/Au bilayers that did not suffer from delamination. By electroplating Au onto the electrodes or by wet etching them to increase mechanical interlocking, this problem…

Author: Liu, Yingkai

Source: University of Maryland

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