device fabrication

Benzocyclobutene-based Electric Micromachines Supported on Microball Bearings: Design, Fabrication, and Characterization

This dissertation summarizes the research activities that led to the development of the first microball-bearing-supported linear electrostatic micromotor with benzocyclobutene (BCB) low-k polymer insulating layers. The primary application of this device is long-range, high-speed linear micropositioning. The future generations of this device

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