Benzocyclobutene-based Electric Micromachines Supported on Microball Bearings: Design, Fabrication, and Characterization

This dissertation summarizes the research activities that led to the development of the first microball-bearing-supported linear electrostatic micromotor with benzocyclobutene (BCB) low-k polymer insulating layers. The primary application of this device is long-range, high-speed linear micropositioning. The future generations of this device include rotary electrostatic micromotors and microgenerators. The development of the first generation of microball-bearing-supported micromachines, including device theory, design, and modeling, material characterization, process development, device fabrication, and device test and characterization is presented…

Author: Modafe, Alireza

Source: University of Maryland

Download Link: Click Here To Download This Report

Reference URL: Visit Now

Reference URL: Visit Now

Leave a Comment