Design and Fabrication of Electrothermal Micromotors and Compliant Mechanisms for Spatial Parallel Micromanipulators

In this dissertation a new class of spatial micromechanisms employing compliant joints and electrothermal motors has been developed. The spatial micromechanisms contain three limbs driven by individual electrothermal linear motors to form multiple degree-of-freedom (DOF) manipulators. At the coaxial point of the actuated limbs, a platform acts as the end effector of the device. Each limb in this spatial mechanism interconnects compliant pseudo-revolute joints, which are capable of providing either in-plane or out-of-plane…

Author:Cheng, Wei-Jen

Source: University of Maryland

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