This dissertation studies synthesis, microstructure and properties of binary and ternary carbide thin films deposited by dc magnetron sputtering. These kind of materials are fascinating as they present an array of useful properties, like high hardness, resistance to wear and oxidation, and high electrical conductivity. Here, an early transition metal (M) and carbon (C) have been utilized as the basis, often with the help of a second M-element or an A-group element (A). In these systems nanocomposites, metastable solid solutions, multilayers, or Mn+1AXn-phases have been deposited…
Contents
Chapter 1 Introduction
1.1 Research objectives
Chapter 2 Transition-metal carbides and related compounds
2.1 MC – Binary carbides
2.2 Disordered solid solutions
2.3 M3AC – Perovskite carbides
2.4 Mn+1ACn – MAX-phases
Chapter 3 Thin film synthesis
Chapter 4 Thin film growth
Chapter 5 Characterization
5.1 X-ray diffraction
5.2 X-ray photoelectron spectroscopy (XPS
5.3 Soft X-ray spectroscopy
5.3 Raman spectroscopy
5.4 Scanning electron microscopy (SEM)
5.5 Transmission electron microscopy (TEM)
5.6 Electrical characterization
5.7 Mechanical characterization – Nanoindentation
5.8 Tribological characterization
Chapter 6 Theory
Chapter 7 Results and discussion
7.1 Film Synthesis of MAX-phases in the Ti-Al-C and V-Ge-C systems….
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