Integrated optics, or guided wave optics, is playing an increasingly important role in optical communication networks and optical sensor systems today. Optical devices with diverse functionality based on different materials have been demonstrated. Recently, polymeric waveguide devices have attracted a great deal
A key platform technology for InP optical waveguide MEMS is developed. The novel waveguide design is entirely released from the substrate by sacrificial etching and the suspended waveguide is supported by lateral tethers. This allows free-standing, movable segments of waveguide while preventing
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